vacuum sensors – hvs series

vacuum sensors – hvs series-大富豪官方网站

the hvs series is our vacuum sensing series. these miniature pirani-type vacuum sensors allow measurements in a pressure range from 1000 mbar (atmospheric pressure) down to 10-3 mbar (hvs 04), and 10 mbar down to 10-5 mbar resp. 10-6 mbar (hvs 03k resp. hvs 03g). they come in a small and robust to-39 or to-8 metal housing. assembling the hvs 04 and hvs 03g in a to-8 housing allows coverage of the full pressure range.

pirani measurement principle
very large pressure range 1000 mbar to 10^-6 mbar
small form factor to-39 or to-8
robust metal housing
high sensitivity

	hvs 03k	hvs 04	hvs 03g 04 (dual)
housing	to-39	to-39	to-8	unit
chip size	4.0²	1.0²	5.0² 1.0²	mm²
max. signal voltage	400	410	370 410	mv
resistance sensor chip	9	1	9 1	kohm
on chip ref. resistor	9	1	9 1	kohm
supply voltage	3.2	2	2	v
operating temperature	-20 .. 120	-20 .. 120	-20 .. 120	°c
storage temperature	-40 .. 120	-40 .. 120	-40 .. 120	°c